Thin film barium strontium titanate capacitors for tunable RF front-end applications

摘要

In this thesis, the results of intensive electrical characterization, modeling and the design of hardware with thin film tunable capacitors, i.e., dielectric varactors, has been presented and discussed. Especially the quality factor Q and the tuning ratio of the tunable capacitors have been studied, since these are crucial parameters for reconfigurable RF front-end applications for mobile phones.